Abstract

Zinc oxide (ZnO) films have been deposited by spray pyrolysis technique at different substrate temperatures. The effects of substrate temperature on the structural and electrical properties of ZnO films produced by this technique have been investigated. X-ray diffraction spectra of the films have shown that the films are polycrystalline and hexagonal wurtzite in structure. From these spectra, grain size and texture coefficient (TC) are calculated. The conductivity of ZnO films was determined from current-voltage characteristics measured at room temperature and in dark. The ohmic conduction mechanism was observed to take place in all the films.